TY  - RPRT
TI  - Boron Liquid Metal Alloy Ion Sources For Special FIB Applications
AU  - Lothar Bischoff
AU  - Nico Klingner
AU  - Paul Mazarov
AU  - Wolfgang Pilz
AU  - Florian Meyer
PY  - 2020
DO  - 10.1116/6.0000073
UR  - https://arxiv.org/abs/2004.12722
ID  - 2004.12722
ER  -