@misc{indiciaeef7d64b37084, title = {Raman spectroscopy of ion irradiated SiC: chemical defects, strain, annealing, and oxidation}, author = {Alexander J. Leide and Matthew J. Lloyd and Richard I. Todd and David E. J. Armstrong}, year = {2020}, url = {https://arxiv.org/abs/2004.14335}, note = {Source identifier: 2004.14335} }