TY - RPRT TI - Raman spectroscopy of ion irradiated SiC: chemical defects, strain, annealing, and oxidation AU - Alexander J. Leide AU - Matthew J. Lloyd AU - Richard I. Todd AU - David E. J. Armstrong PY - 2020 UR - https://arxiv.org/abs/2004.14335 ID - 2004.14335 ER -