TY - RPRT TI - Measurement of swelling-induced residual stress in ion implanted SiC, and its effect on micromechanical properties AU - Alexander J. Leide AU - Richard I. Todd AU - David E. J. Armstrong PY - 2020 DO - 10.1016/j.actamat.2020.06.030 UR - https://arxiv.org/abs/2004.14688 ID - 2004.14688 ER -