@misc{indiciae73065499fa86,
  title = {On the origin of the premature breakdown of thermal oxide on 3C-SiC probed by electrical scanning probe microscopy},
  author = {P. Fiorenza and E. Schilirò and F. Giannazzo and C. Bongiorno and M. Zielinski and F. La Via and F. Roccaforte},
  year = {2020},
  doi = {10.1016/j.apsusc.2020.146656},
  url = {https://arxiv.org/abs/2005.01290},
  note = {Source identifier: 2005.01290}
}