TY  - RPRT
TI  - On the origin of the premature breakdown of thermal oxide on 3C-SiC probed by electrical scanning probe microscopy
AU  - P. Fiorenza
AU  - E. Schilirò
AU  - F. Giannazzo
AU  - C. Bongiorno
AU  - M. Zielinski
AU  - F. La Via
AU  - F. Roccaforte
PY  - 2020
DO  - 10.1016/j.apsusc.2020.146656
UR  - https://arxiv.org/abs/2005.01290
ID  - 2005.01290
ER  -