TY  - RPRT
TI  - Optical Metrology of Sub-Wavelength Objects Enabled by Artificial Intelligence
AU  - Carolina Rendón-Barraza
AU  - Eng Aik Chan
AU  - Guanghui Yuan
AU  - Giorgio Adamo
AU  - Tanchao Pu
AU  - Nikolay I. Zheludev
PY  - 2020
UR  - https://arxiv.org/abs/2005.04905
ID  - 2005.04905
ER  -