@misc{indiciaedf63e847cbd8,
  title = {Transition metal nitride thin films deposited at CMOS compatible temperatures for tunable optoelectronic and plasmonic devices},
  author = {Ryan Bower and Daniel A. L. Loch and Andrey Berenov and Bin Zou and Papken Eh. Hovsepian and Arutiun P. Ehiasarian and Peter K. Petrov},
  year = {2020},
  url = {https://arxiv.org/abs/2005.05185},
  note = {Source identifier: 2005.05185}
}