@misc{indiciae27d6c46fcace,
  title = {Etching process of narrow wire and application to tunable-barrier electron pump},
  author = {Shota Norimoto and Shuichi Iwakiri and Masahiko Yokoi and Tomonori Arakawa and Yasuhiro Niimi and Kensuke Kobayashi},
  year = {2020},
  doi = {10.1063/5.0011767},
  url = {https://arxiv.org/abs/2005.10533},
  note = {Source identifier: 2005.10533}
}