TY  - RPRT
TI  - Etching process of narrow wire and application to tunable-barrier electron pump
AU  - Shota Norimoto
AU  - Shuichi Iwakiri
AU  - Masahiko Yokoi
AU  - Tomonori Arakawa
AU  - Yasuhiro Niimi
AU  - Kensuke Kobayashi
PY  - 2020
DO  - 10.1063/5.0011767
UR  - https://arxiv.org/abs/2005.10533
ID  - 2005.10533
ER  -