@misc{indiciaedb1f4e40716e, title = {Thermo-Optic Properties of Silicon-Rich Silicon Nitride for On-chip Applications}, author = {Hani Nejadriahi and Alex Friedman and Rajat Sharma and Steve Pappert and Yeshaiahu Fainman and Paul Yu}, year = {2020}, doi = {10.1364/oe.396969}, url = {https://arxiv.org/abs/2005.13348}, note = {Source identifier: 2005.13348} }