@misc{indiciae090072ae073b,
  title = {High-yield wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits},
  author = {Junqiu Liu and Guanhao Huang and Rui Ning Wang and Jijun He and Arslan S. Raja and Tianyi Liu and Nils J. Engelsen and Tobias J. Kippenberg},
  year = {2020},
  doi = {10.1038/s41467-021-21973-z},
  url = {https://arxiv.org/abs/2005.13949},
  note = {Source identifier: 2005.13949}
}