@misc{indiciaebaf89b4753b0, title = {Erbium implanted silicon for solid-state quantum technologies}, author = {Mark A. Hughes and Naitik A. Panjwani and Matias Urdampilleta and Nafsika Theodoropoulou and Ilana Wisby and Kevin P. Homewood and Ben Murdin and Tobias Lindström and J. David Carey}, year = {2020}, url = {https://arxiv.org/abs/2006.00225}, note = {Source identifier: 2006.00225} }