@misc{indiciae6c2bc9f859d5,
  title = {MEMS Heat Flux Sensor},
  author = {Antti Immonen and Saku Levikari and Feng Gao and Mikko Kuisma and Pertti Silventoinen},
  year = {2020},
  url = {https://arxiv.org/abs/2006.02808},
  note = {Source identifier: 2006.02808}
}