@misc{indiciae59becabd8a16,
  title = {Experimental setups for XPS measurements beyond the instrumental lateral resolution limit},
  author = {Uwe Scheithauer},
  year = {2020},
  doi = {10.1002/sia.6828},
  url = {https://arxiv.org/abs/2006.03405},
  note = {Source identifier: 2006.03405}
}