@misc{indiciaecc07375ce651,
  title = {Machine learning techniques applied for detection of nanoparticles on surfaces using Coherent Fourier Scatterometry},
  author = {D. Kolenov and S. F. Pereira},
  year = {2020},
  doi = {10.1364/oe.395233},
  url = {https://arxiv.org/abs/2006.03475},
  note = {Source identifier: 2006.03475}
}