TY  - RPRT
TI  - Machine learning techniques applied for detection of nanoparticles on surfaces using Coherent Fourier Scatterometry
AU  - D. Kolenov
AU  - S. F. Pereira
PY  - 2020
DO  - 10.1364/oe.395233
UR  - https://arxiv.org/abs/2006.03475
ID  - 2006.03475
ER  -