@misc{indiciae67f89ca50775,
  title = {Multiscale simulation of the focused electron beam induced deposition process},
  author = {Pablo de Vera and Martina Azzolini and Gennady Sushko and Isabel Abril and Rafael Garcia-Molina and Maurizio Dapor and Ilia A. Solov'yov and Andrey V. Solov'yov},
  year = {2020},
  doi = {10.1038/s41598-020-77120-z},
  url = {https://arxiv.org/abs/2006.04085},
  note = {Source identifier: 2006.04085}
}