@misc{indiciae920ba0988b16,
  title = {Effect of substrate bias on microstructure of epitaxial film grown by HiPIMS: An atomistic simulation},
  author = {Movaffaq Kateb and Jon Tomas Gudmundsson and Snorri Ingvarsson},
  year = {2020},
  url = {https://arxiv.org/abs/2006.05813},
  note = {Source identifier: 2006.05813}
}