TY  - RPRT
TI  - Effect of substrate bias on microstructure of epitaxial film grown by HiPIMS: An atomistic simulation
AU  - Movaffaq Kateb
AU  - Jon Tomas Gudmundsson
AU  - Snorri Ingvarsson
PY  - 2020
UR  - https://arxiv.org/abs/2006.05813
ID  - 2006.05813
ER  -