@misc{indiciaea39ca0eb1aa0,
  title = {Spin coherence and depths of single nitrogen-vacancy centers created by ion implantation into diamond via screening masks},
  author = {Shuntaro Ishizu and Kento Sasaki and Daiki Misonou and Tokuyuki Teraji and Kohei M. Itoh and Eisuke Abe},
  year = {2020},
  doi = {10.1063/5.0012187},
  url = {https://arxiv.org/abs/2006.07763},
  note = {Source identifier: 2006.07763}
}