TY  - RPRT
TI  - Spin coherence and depths of single nitrogen-vacancy centers created by ion implantation into diamond via screening masks
AU  - Shuntaro Ishizu
AU  - Kento Sasaki
AU  - Daiki Misonou
AU  - Tokuyuki Teraji
AU  - Kohei M. Itoh
AU  - Eisuke Abe
PY  - 2020
DO  - 10.1063/5.0012187
UR  - https://arxiv.org/abs/2006.07763
ID  - 2006.07763
ER  -