@misc{indiciaec605f7b9a655, title = {Bidirectional Self-Folding with Atomic Layer Deposition Nanofilms for Microscale Origami}, author = {Baris Bircan and Marc Z. Miskin and Robert J. Lang and Michael C. Cao and Kyle J. Dorsey and Muhammad G. Salim and Wei Wang and David A. Muller and Paul L. McEuen and Itai Cohen}, year = {2020}, doi = {10.1021/acs.nanolett.0c00824}, url = {https://arxiv.org/abs/2006.10269}, note = {Source identifier: 2006.10269} }