@misc{indiciaec84030f09569,
  title = {Formation of Uniform Crystal and Reduction of Electrical Variation in HfZrO\$\_2\$ Ferroelectric Memory by Thermal Engineering},
  author = {Sourav De and Bo-Han Qiu and Md. Aftab Baig and Darsen D. Lu and Yao-Jen Lee},
  year = {2020},
  url = {https://arxiv.org/abs/2006.10691},
  note = {Source identifier: 2006.10691}
}