TY  - RPRT
TI  - Formation of Uniform Crystal and Reduction of Electrical Variation in HfZrO$_2$ Ferroelectric Memory by Thermal Engineering
AU  - Sourav De
AU  - Bo-Han Qiu
AU  - Md. Aftab Baig
AU  - Darsen D. Lu
AU  - Yao-Jen Lee
PY  - 2020
UR  - https://arxiv.org/abs/2006.10691
ID  - 2006.10691
ER  -