TY - RPRT TI - Nondestructive femtosecond laser lithography of Ni nanocavities by controlled thermo-mechanical spallation at the nanoscale AU - V. V. Temnov AU - A. Alekhin AU - A. Samokhvalov AU - D. S. Ivanov AU - P. Vavassori AU - V. P. Veiko PY - 2020 DO - 10.1021/acs.nanolett.0c02574 UR - https://arxiv.org/abs/2006.11661 ID - 2006.11661 ER -