@misc{indiciae60819283ed89,
  title = {Coherent superconducting qubits from a subtractive junction fabrication process},
  author = {Alexander Stehli and Jan David Brehm and Tim Wolz and Paul Baity and Sergey Danilin and Valentino Seferai and Hannes Rotzinger and Alexey V. Ustinov and Martin Weides},
  year = {2020},
  doi = {10.1063/5.0023533},
  url = {https://arxiv.org/abs/2006.16862},
  note = {Source identifier: 2006.16862}
}