TY  - RPRT
TI  - Conversion pathways of primary defects by annealing in proton-irradiated n-type 4H-SiC
AU  - Robert Karsthof
AU  - Marianne Etzelmüller Bathen
AU  - Augustinas Galeckas
AU  - Lasse Vines
PY  - 2020
DO  - 10.1103/physrevb.102.184111
UR  - https://arxiv.org/abs/2007.03985
ID  - 2007.03985
ER  -