@misc{indiciae415c030951be,
  title = {Fabrication of Germanium-on-insulator in a Ge wafer with a crystalline Ge top layer and buried GeO2 layer by Oxygen ion implantation},
  author = {Vishal Kumar Aggarwal and Ankita Ghatak and Dinakar Kanjilal and Debdulal Kabiraj and Achintya Singha and Sandip Bysakh and Samar Kumar Medda and Supriya Chakraborty and A. K. Raychaudhuri},
  year = {2020},
  doi = {10.1016/j.mseb.2020.114616},
  url = {https://arxiv.org/abs/2007.05897},
  note = {Source identifier: 2007.05897}
}