TY  - RPRT
TI  - Fabrication of Germanium-on-insulator in a Ge wafer with a crystalline Ge top layer and buried GeO2 layer by Oxygen ion implantation
AU  - Vishal Kumar Aggarwal
AU  - Ankita Ghatak
AU  - Dinakar Kanjilal
AU  - Debdulal Kabiraj
AU  - Achintya Singha
AU  - Sandip Bysakh
AU  - Samar Kumar Medda
AU  - Supriya Chakraborty
AU  - A. K. Raychaudhuri
PY  - 2020
DO  - 10.1016/j.mseb.2020.114616
UR  - https://arxiv.org/abs/2007.05897
ID  - 2007.05897
ER  -