@misc{indiciaed94a1242a91d,
  title = {Soft chemistry assisted On-chip Integration of Nanostructured quartz-based Piezoelectric Microelectromechanical System},
  author = {Claire Jolly and Andres Gomez and David Sanchez-Fuentes and Dilek Cakiroglu and Raissa Rathar and Nicolas Maurin and Ricardo Garcia-Bermejo and Benoit Charlot and Marti Gich and Michael Bahriz and Laura Picas and Adrian Carretero-Genevrier},
  year = {2020},
  url = {https://arxiv.org/abs/2007.07566},
  note = {Source identifier: 2007.07566}
}