@misc{indiciaef076cd824ce9,
  title = {High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform},
  author = {Sarveshwar Sharma and Nishant Sirse and Miles M Turner},
  year = {2020},
  doi = {10.1088/1361-6595/abbac2},
  url = {https://arxiv.org/abs/2007.09624},
  note = {Source identifier: 2007.09624}
}