TY  - RPRT
TI  - High frequency sheath modulation and higher harmonic generation in a low pressure very high frequency capacitively coupled plasma excited by sawtooth waveform
AU  - Sarveshwar Sharma
AU  - Nishant Sirse
AU  - Miles M Turner
PY  - 2020
DO  - 10.1088/1361-6595/abbac2
UR  - https://arxiv.org/abs/2007.09624
ID  - 2007.09624
ER  -