TY - RPRT TI - Nanoscale dynamics during self-organized ion beam patterning of Si: I. Ar$^+$ Bombardment AU - Peco Myint AU - Karl F. Ludwig Jr. AU - Lutz Wiegart AU - Yugang Zhang AU - Andrei Fluerasu AU - Xiaozhi Zhang AU - Randall L. Headrick PY - 2021 DO - 10.1103/physrevb.103.195423 UR - https://arxiv.org/abs/2007.12253 ID - 2007.12253 ER -