@misc{indiciae570abecbdbe8, title = {Shadow-wall lithography of ballistic superconductor-semiconductor quantum devices}, author = {Sebastian Heedt and Marina Quintero-Pérez and Francesco Borsoi and Alexandra Fursina and Nick van Loo and Grzegorz P. Mazur and Michał P. Nowak and Mark Ammerlaan and Kongyi Li and Svetlana Korneychuk and Jie Shen and May An Y. van de Poll and Ghada Badawy and Sasa Gazibegovic and Kevin van Hoogdalem and Erik P. A. M. Bakkers and Leo P. Kouwenhoven}, year = {2020}, doi = {10.1038/s41467-021-25100-w}, url = {https://arxiv.org/abs/2007.14383}, note = {Source identifier: 2007.14383} }