@misc{indiciae6e3b056114eb,
  title = {Thermal Stability of Hafnium Zirconium Oxide on Transition Metal Dichalcogenides},
  author = {Maria Gabriela Sales and Samantha T. Jaszewski and Shelby S. Fields and Jon F. Ihlefeld and Stephen J. McDonnell},
  year = {2020},
  doi = {10.1016/j.apsusc.2021.149058},
  url = {https://arxiv.org/abs/2007.15685},
  note = {Source identifier: 2007.15685}
}