@misc{indiciaede2ca33dfbf1, title = {DAMO: Deep Agile Mask Optimization for Full Chip Scale}, author = {Guojin Chen and Wanli Chen and Yuzhe Ma and Haoyu Yang and Bei Yu}, year = {2020}, doi = {10.1145/3400302.3415705}, url = {https://arxiv.org/abs/2008.00806}, note = {Source identifier: 2008.00806} }