@misc{indiciaef4aea837a9af,
  title = {Fast fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime},
  author = {Michaela Lammel and Kevin Geishendorf and Marisa Choffel and Danielle Hamann and David Johnson and Kornelius Nielsch and Andy Thomas},
  year = {2020},
  doi = {10.1063/5.0024991},
  url = {https://arxiv.org/abs/2008.04626},
  note = {Source identifier: 2008.04626}
}