TY  - RPRT
TI  - Fast fourier transform and multi-Gaussian fitting of XRR data to determine the thickness of ALD grown thin films within the initial growth regime
AU  - Michaela Lammel
AU  - Kevin Geishendorf
AU  - Marisa Choffel
AU  - Danielle Hamann
AU  - David Johnson
AU  - Kornelius Nielsch
AU  - Andy Thomas
PY  - 2020
DO  - 10.1063/5.0024991
UR  - https://arxiv.org/abs/2008.04626
ID  - 2008.04626
ER  -