TY  - RPRT
TI  - Multiobjective optimization in design of broadband extreme ultraviolet multilayers
AU  - Shang-qi Kuang
AU  - Xiao-wei Song
AU  - Jing-quan Lin
PY  - 2020
UR  - https://arxiv.org/abs/2008.06165
ID  - 2008.06165
ER  -