@misc{indiciaeba05b226640a,
  title = {Delta-doped \textbackslash{}b\{eta\}-Ga2O3 Films With Low FWHM Charge Profile Grown By Metalorganic Vapor-Phase Epitaxy},
  author = {Praneeth Ranga and Arkka Bhattacharyya and Adrian Chmielewski and Saurav Roy and Nasim Alem and Sriram Krishnamoorthy},
  year = {2020},
  doi = {10.1063/5.0027827},
  url = {https://arxiv.org/abs/2008.12934},
  note = {Source identifier: 2008.12934}
}