TY  - RPRT
TI  - Delta-doped \b{eta}-Ga2O3 Films With Low FWHM Charge Profile Grown By Metalorganic Vapor-Phase Epitaxy
AU  - Praneeth Ranga
AU  - Arkka Bhattacharyya
AU  - Adrian Chmielewski
AU  - Saurav Roy
AU  - Nasim Alem
AU  - Sriram Krishnamoorthy
PY  - 2020
DO  - 10.1063/5.0027827
UR  - https://arxiv.org/abs/2008.12934
ID  - 2008.12934
ER  -