@misc{indiciaee975c09d5cff,
  title = {Large-area femtosecond laser milling of silicon employing trench analysis},
  author = {Arun Bhaskar and Justine Philippe and Flavie Braud and Etienne Okada and Vanessa Avramovic and Jean-François Robillard and Cédric Durand and Daniel Gloria and Christophe Gaquière and Emmanuel Dubois},
  year = {2020},
  doi = {10.1016/j.optlastec.2020.106866},
  url = {https://arxiv.org/abs/2008.13205},
  note = {Source identifier: 2008.13205}
}