@misc{indiciae92050d90bd18,
  title = {Role of energetic ions in the growth of fcc and ω crystalline phases in Ti films deposited by HiPIMS},
  author = {David Dellasega and Francesco Mirani and Davide Vavassori and Claudia Conti and Matteo Passoni},
  year = {2021},
  doi = {10.1016/j.apsusc.2021.149678},
  url = {https://arxiv.org/abs/2008.13709},
  note = {Source identifier: 2008.13709}
}