TY  - RPRT
TI  - Role of energetic ions in the growth of fcc and ω crystalline phases in Ti films deposited by HiPIMS
AU  - David Dellasega
AU  - Francesco Mirani
AU  - Davide Vavassori
AU  - Claudia Conti
AU  - Matteo Passoni
PY  - 2021
DO  - 10.1016/j.apsusc.2021.149678
UR  - https://arxiv.org/abs/2008.13709
ID  - 2008.13709
ER  -