TY  - RPRT
TI  - Efficient resonance management in ultrahigh-Q one-dimensional photonic crystal nanocavities fabricated on 300 mm SOI CMOS platform
AU  - Weiqiang Xie
AU  - Peter Verheyen
AU  - Marianna Pantouvaki
AU  - Joris Van Campenhout
AU  - Dries Van Thourhout
PY  - 2020
UR  - https://arxiv.org/abs/2009.01351
ID  - 2009.01351
ER  -