@misc{indiciaef9f97dff5c54,
  title = {First-principles study on structure and anisotropy of high N-atom density layer in 4H-SiC},
  author = {Mitsuharu Uemoto and Naoki Komatsu and Yoshiyuki Egami and Tomoya Ono},
  year = {2021},
  doi = {10.7566/jpsj.90.124713},
  url = {https://arxiv.org/abs/2009.01627},
  note = {Source identifier: 2009.01627}
}