TY  - RPRT
TI  - First-principles study on structure and anisotropy of high N-atom density layer in 4H-SiC
AU  - Mitsuharu Uemoto
AU  - Naoki Komatsu
AU  - Yoshiyuki Egami
AU  - Tomoya Ono
PY  - 2021
DO  - 10.7566/jpsj.90.124713
UR  - https://arxiv.org/abs/2009.01627
ID  - 2009.01627
ER  -