@misc{indiciae13b022580d04,
  title = {Deterministic Single Ion Implantation with 99.87\% Confidence for Scalable Donor-Qubit Arrays in Silicon},
  author = {Alexander M. Jakob and Simon G. Robson and Vivien Schmitt and Vincent Mourik and Matthias Posselt and Daniel Spemann and Brett C. Johnson and Hannes R. Firgau and Edwin Mayes and Jeffrey C. McCallum and Andrea Morello and David N. Jamieson},
  year = {2020},
  doi = {10.1002/adma.202103235},
  url = {https://arxiv.org/abs/2009.02892},
  note = {Source identifier: 2009.02892}
}