@misc{indiciae706ada0673db,
  title = {Atomic Precision Processing of New Materials for Frontier Microelectronic Applications in High Performance Computing and Artificial Intelligence},
  author = {Yevgeny Raitses and Sebastian Engelmann and Shahid Rauf and Igor Kaganovich and Jonathan Menard and Steven Cowely},
  year = {2020},
  url = {https://arxiv.org/abs/2009.03109},
  note = {Source identifier: 2009.03109}
}